Ultra-fast I-V sourcing and measuring is made easy with the 4200-SCS software. With the Ultra-Fast I-V instrument module, three types of pulse testing are easily performed: Pulsed I-V, Transient I-V and Pulsed Sourcing or also called Segmented Arbitrary (Seg. Arb.) Waveform. The 4200-SCS includes many application tests that facilitate rapid startup and allows you to understand device behavior quickly.
SMUs are precision instruments which are used for sourcing current or voltage and simultaneously measuring current and voltage with high accuracy and speed.
Two SMU models are available for use with the 4200-SCS, the 4200-SMU medium power SMU or 4210-SMU high power SMU. Both models occupy only one instrument slot and up to a total of nine can be installed in the 4200-SCS.
Offering the industryâ€™s widest dynamic range, the medium power 4200-SMU operates from 100 nA to 100 mA and 1 uV to 210 V and the high power 4210-SMU operates up to 1 A. The low current measurement capabilities of either SMU can be extended to 0.1 fA resolution by adding an optional preamplifier.
The 4200-SCS can be configured to support multi-frequency (1 kHz to 10 MHz) C-V, Very Low Frequency (10 mHz – 10 Hz) C-V, and Quasi-static C-V measurements.
The 4210-CVU multi-frequency C-V module occupies one slot in the 4200-SCS chassis and provides C-V, C-t, and C-f measurement sweeps with up to 4096 data points. Built-in compensation routines remove parasitic effects and ensures the integrity of connections to the DUT. An optional power package allows a DC voltage bias of up to +/- 200 V.
The Very Low Frequency C-V method takes advantage of the low current measurement capability of the 4200-SCS Source Measure units (SMUs) to perform C-V measurements. The Very Low Frequency C-V technique makes it possible to measure very small capacitances at a precise low test frequency. This patent-pending, narrow-band sinusoidal technique allows for low frequency C-V measurements of very high impedance devices, up to >1E15 ohms.
Quasi-static C-V employs a DC measurement technique using two 4200-SCS Source Measure Units (SMUs) with two 4200-PA preamplifiers. The SMUs are used to source a current to charge the capacitor, and then to measure the voltage, time and discharge current. The 4200-SCS software includes test programs and formulas to extract common C-V parameters.
Ultra-Fast I-V Modules
Each Model 4225-PMU module provides two channels of integrated sourcing and measurement but occupies only a single slot in the Model 4200-SCS's nine-slot chassis. Unlike competitive solutions, each channel of the Model 4225-PMU combines high speed voltage outputs (with pulse widths ranging from 60 nanoseconds to DC) with simultaneous current and voltage measurements. Each 4200-SCS chassis can accommodate up to six Model 4225-PMU modules, for a maximum of twelve ultra-fast source and measure channels.
The Model 4225-PMU can be used to perform three types of ultra-fast I-V tests: Pulsed I-V, Transient I-V, and Pulsed Sourcing. Pulse and transient measurements add a time domain dimension to your analysis and allows for dynamic characteristics to be explored. Using pulsed I-V signals to characterize devices rather than DC signals makes it possible to study or reduce the effects of self-heating or minimize current drift due to trapped charge. Pulsed sourcing can also be used to stress test a device during reliability cycling or program & erase memory devices.
Remote Amplifier/Switch Units
The low current measurement capabilities of the Ultra-fast I-V module can be extended by adding the 4225-RPM. Additionally, the RPM acts as a multiplex switch, allowing you to automatically switch between SMUs, C-V or Ultra-fast I-V modules.
One of the most difficult problems when making I-V, C-V and Pulsed I-V measurements is that the cables required for each measurement type are fundamentally different. Guarding is necessary to achieve low current I-V measurements, which makes triaxial cables necessary. C-V measurements use four coaxial cables with the outer shells connected together. Pulsed measurements require the highest bandwidth of the three measurement types, so the cable must have a characteristic impedance that matches the source impedance to prevent reflections. Multi-Measurement Performance Cables (MMPC) simplifies switching between DC I-V, C-V, and pulsed I-V testing configurations. No matter what type of measurement is being made, you wonâ€™t have to change the probe manipulator cablingâ€”just move the cables from one instrument module to another. In addition, you can change the setup while the probe needles stay in contact with a wafer, reducing pad damage and maintaining the same contact impedance for all three types of measurements. MMPC Cables are available for select Cascade Microtech, Suss, Lucas Signatone and Wentworth probe stations.
The 4200-SCS can control external equipment such as an automated or semi-automated probe stations, temperature controllers etc. Probe drivers are supplied with the 4200-SCS for select Cascade Microtech, Suss, MicroManipulator and Signatone probe stations.
Device Under Test (DUT)
The 4200-SCS is capable of testing many cutting-edge devices or materials such as: