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4200-SCS/F

Semiconductor Characterization System with Flat Panel Display - DC I-V, C-V, and Pulse in One Test Environment

 

The easy-to-use Model 4200-SCS Semiconductor Characterization System performs lab grade DC and pulse device characterization, real-time plotting, and analysis with high precision and sub-femtoamp resolution. The 4200-SCS offers the most advanced capabilities available in a fully integrated characterization system, including a complete, embedded PC with Windows operating system and mass storage. Its self-documenting, point-and-click interface speeds and simplifies the process of taking data, so users can begin analyzing their results sooner. Additional features enable stress-measure capabilities suitable for a variety of reliability tests as well as provide precision measurement and high resolution with LCR meter support.
 
Optional Instrumentation:
  • Model 4225-PMU Ultra-Fast I-V Module
  • Model 4220-PGU Pulse Generator Unit (Voltage-Source only)
  • Model 4225-RPM Remote Amplifier/Switch
  • Model 4200-SMU Medium Power Source-Measure Unit
  • Model 4210-SMU High Power Source-Measure Unit for 4200-SCS
  • Model 4200-PA Remote PreAmp Option for 4200-SMU and 4210-SMU
  • Model 4210-CVU 1kHz - 10MHz Capacitance Voltage Measurement Unit
  • Model 4200-SCP2 Dual-Channel Oscilloscope Card
  • Model 4200-SCP2HR 200MS Dual-Channel Oscilloscope Card
 
Ultra-Fast I-V Application Package:
  • Model 4225-PMU Ultra-Fast I-V Module
 
 
 
Model 4225-PMU
Ultra-Fast I-V Module
 
The Model 4225-PMU Ultra Fast I-V Module is the latest addition to the growing range of instrumentation options for the Model 4200-SCS Semiconductor Characterization System. It integrates ultra-fast voltage waveform generation and signal observation capabilities into the Model 4200-SCS's already powerful test environment to deliver unprecedented I-V testing performance, expanding the system's materials, device, and process characterization potential dramatically. Just as important, it makes ultra-fast I-V sourcing and measurement as easy as making DC measurements with a traditional high resolution Source-Measure Unit (SMU).
Each plug-in Model 4225-PMU module provides two channels of integrated sourcing and measurement but occupies only a single slot in the Model 4200-SCS's nine-slot chassis. Unlike competitive solutions, each channel of the Model 4225-PMU combines high speed voltage outputs (with pulse widths ranging from 60 nanoseconds to DC) with simultaneous current and voltage measurements. With this combination of ultra high-speed voltage source and voltage and current measurement capabilities, existing Model 4200-SCS systems can be easily upgraded into a flexible measurement tool for a wide range of ultra-fast I-V test applications. Each chassis can accommodate up to four Model 4225-PMU modules, for a maximum of eight ultra-fast source and measure channels, leaving five other chassis slots free for installing other types of instrumentation. These hardware and software capabilities are also available for new Model 4200-SCS systems as factory-installed options.
Features
 
  • Provides voltage outputs with programmable timing from 60ns to DC in 10ns steps
  • Measure I and V simultaneously, at acquisition rates of up to 200 megasamples/second (MS/s)
  • Choose from two voltage source ranges (±10V or ± 40V) and four current measurement ranges (800mA, 200mA, 10mA, 100µA)
  • Each module provides two channels of integrated simultaneous I-V sourcing and measurement; plug in up to four modules in a single chassis for eight synchronized channels
  • Model 4220-PGU Pulse Generator Unit offers a voltage-sourcing-only alternative to the Model 4225-PMU
  • Optional Model 4225-RPM Remote Amplifier/Switch expands current ranges (10mA, 1mA, 100µA, 10µA, 1µA, 100nA), switches sourcing/measurement between the Model 4225-PMU, Model 4210-CVU, Model 4200-SMU, and 4210-SMU
Model 4220-PGU
Pulse Generator Unit (Voltage-Source only)
 
The Model 4220-PGU Pulse Generator Unit offers a voltage-sourcing-only alternative to the Model 4225-PMU Ultra-Fast I-V Module.
 
 
Model 4225-RPM
Remote Amplifier/Switch
 
The optional Model 4225-RPM Remote Amplifier/Switch expands on the Model 4225-PMU's capabilities by providing four additional low current ranges, offering current sensitivity down to tens of picoamps. The Model 4225-RPM also reduces cable capacitance effects and supports switching automatically between the Model 4225-PMU, the Model 4210-CVU, and other SMU modules installed in the chassis, allowing the operator to choose the most appropriate instrument for a particular measurement task without re-cabling.
 
Features
 
  • Expands current ranges (10mA, 1mA, 100µA, 10µA, 1µA, 100nA), switches sourcing/measurement between the Model 4225-PMU, Model 4210-CVU, Model 4200-SMU, and 4210-SMU 
Model 4200-SMU 
Medium Power Source-Measure Unit for 4200-SCS (100mA to 100fA, 200V to 1uV, 2 Watt)
 
Each Model 4200-SCS Semiconductor Characterizatin System can be configured with up to seven additional SMUs, for a total of nine SMUs. Two SMU models are available for use with the Model 4200-SCS, The Model 4200-SMU is a medium power (100mA, 2W) instrument, and the Model 4210-SMU is a high power (1A, 20W) instrument. The Model 4200-SCS system can support up to nine high power SMUs.
 
Model 4210-SMU 
High Power Source-Measure Unit for 4200-SCS (1A to 100fA, 200V to 1uV, 20 Watt)
 
Each Model 4200-SCS Semiconductor Characterizatin System can be configured with up to seven additional SMUs, for a total of nine SMUs. Two SMU models are available for use with the Model 4200-SCS, The Model 4200-SMU is a medium power (100mA, 2W) instrument, and the Model 4210-SMU is a high power (1A, 20W) instrument. The Model 4200-SCS system can support up to nine high power SMUs.
 
Model 4200-PA 
Remote PreAmp Option for 4200-SMU and 4210-SMU
 
The low current measurement capabilities of any SMU can be extended by adding an optional Remote PreAmp (Model 4200-PA). The Model 4200-PA provides 0.1fA resolution by effectively adding five current ranges to either SMU model. The PreAmp module is fully integrated with the system; to the user, the SMU simply appears to have additional measurement resolution available. The Remote PreAmp is shipped installed on the back panel of the Model 4200-SCS for local operation. This installation allows for standard cabling to a prober, test fixture, or switch matrix. Users can remove the PreAmp from the back panel and place it in a remote location (such as in a light-tight enclosure or on the prober platen) to eliminate measurement problems due to long cables. Platen mounts and triax panel mount accessories are available. Remote PreAmps are installed at the factory in numerical order, i.e., SMU1, SMU2, SMU3 . . . up to the number of PreAmps specified.
 
Model 4210-CVU 
1kHz - 10MHz Capacitance Voltage Measurement Unit
 
C-V measurements are as easy to perform as I-V measurements with the integrated C-V instrument. This optional capacitance-voltage instrument performs capacitance measurements from femtoFarads (fF) to nanoFards (nF) at frequencies from 1kHz to 10MHz. The C-V option includes a new power package that supports:
 
  • High power C-V measurements up to 400V (200V per device terminal) for testing high power devices, such as MEMs, LDMOS devices, displays, etc.
  • DC currents up to 300mA for measuring capacitance when a transistor is on.
 
The innovative design of the Model 4200-SCS has eight patents pending and is complemented by the broadest C-V test and analysis library available in any commercial C-V measurement solution. It also supplies diagnostic tools that ensure the validity of your C-V test results.
With this system, you can configure linear or custom C-V and C-f sweeps with up to 4096 data points. In addition, through the open environment of the Model 4200-SCS, you can modify any of the included tests, such as:
 
  • C-V, C-t, and C-f measurements and analysis of:
    • New! Complete solar cell libraries, including DLCP
    • High and low k structures
    • MOSFETs
    • BJTs
    • Diodes
    • III-V compound devices
    • Carbon nanotube (CNT) devices
    • Doping profiles, TOX, and carrier lifetime tests
    • Junction, pin-to-pin, and interconnect capacitance measurements
 
The C-V instrument integrates directly into the Model 4200-SCS chassis. It can be purchased as an upgrade to existing systems or as an option for new systems.
 
 
Model 4200-SCP2 
Dual-Channel Oscilloscope Card
 
The Model 4200-SCP2 Oscilloscope offers both general purpose scope capabilities and time-domain measurements to complement the pulser's time-domain sourcing. The scope can be programmed for automated measurement and data acquisition or used with the standalone GUI application provided to perform traditional oscilloscope tasks. The scope makes measurements in both the time (frequency, rise/fall time) and voltage domains (amplitude, peak-peak, etc.) The measurements can be applied to the entire captured waveform or a selected portion of the waveform by setting cursors.
 
Model 4200-SCP2HR 
200MS Dual-Channel Oscilloscope Card
 
The 16-bit Model 4200-SCP2HR Oscilloscope has a sample rate of up to 400MS/s (also one channel interleaved) and provides both general purpose scope capabilities and time-domain measurements to complement the pulser's time-domain sourcing. The Model 4200-SCP2HR can be programmed for automated measurement and data acquisition or used with the stand-alone GUI designed for performing traditional oscilloscope tasks. The scope makes measurements in both the time (frequency, rise/fall time) and voltage domains (amplitude, peak-peak, etc.) The measurements can be applied to the entire captured waveform or to a selected portion of it by setting cursors.